Communication Equipment
Helping Plants Continue Working Undisrupted
In today’s society, semiconductors have become essential components
produced through numerous processes in highly clean environments.
Muratec’s transportation system for semiconductor plants optimizes
the efficiency of transportation between these processes using
overhead transportation methods that make efficient use of space.
This system ensures the high reliability demanded by semiconductor plants,
which operate continuously without interruption, 24/7.
In semiconductor plants, transportation systems that interconnect multiple processes require a high level of reliability and safety. This is accomplished not only through the operational performance of transport vehicles but also through advanced system control technologies. These technologies include real-time traffic prevention to determine the optimal routes and group control for positioning of multiple transport vehicles. We propose “Full Fab AUTOMATION” that aims to detect, visualize, optimize placement, and automate transportation of all ‘things’ and “things” in a semiconductor fab, including not only transportation between production processes but also the loading and shipping areas outside the clean room.
OHT
AGV
OHT (Overhead Hoist Transport)、AGV (Automated Guided Vehicle)、HTC (High-Throughput Conveyor)
Carrier Stocker
Bare Wafer Stocker
Carrier Stocker、Bare Wafer Stocker、OHB (Over Head Buffer)、Tool Front Buffer、Purge System
MCS（Material Control System）、MDS（MCS Dispatching System）
Overhead Hoist Transport (OHT) is the central component of transportation systems in large plants. It links various processes, handles semiconductor wafers within specialized containers (FOUP), and transports them along designated routes throughout multiple floors and buildings. By integrating storage equipment like stockers and buffers, it establishes an optimized production line that aligns with the progress of each manufacturing process.
